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Linear Stage

Photonics Spectra
May 2013
PI (Physik Instrumente) LP, Air Bearings and Piezo Precision MotionRequest Info
AUBURN, Mass., March 21, 2013 — The miCos MCS XY precision linear stage from PI (Physik Instrumente) LP offers resolution up to 5 nm and 0.2 µm repeatability for optical inspection of precision machined parts, material research, microscopy applications and topographical measurements in semiconductor and flat panel design.

The two-axis positioning system, driven by the SMC Hydra motion controller, can handle loads up to 45 lb and can achieve velocity ranges from 1 µm/s to 200 mm/s. The stage provides 102 mm of positioning range in both axes and achieves ±2-µm straightness/flatness of motion. It delivers angular precision with ±20 µrad yaw and ±40 µrad pitch.

Several motor and position feedback options are offered. For applications where closed-loop operation is not required, lower-cost open-loop stepper motors are offered. Available for higher-performance demands are stepper, DC servo and direct-drive electromagnetic noncontact linear motors.

The device can be combined with linear vertical and rotational stages and goniometric cradles.


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