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Hardware Autofocus/Cleanroom Kit
Jun 2013
Carl Zeiss Spectroscopy GmbHRequest Info
JENA, Germany, June 25, 2013 — Carl Zeiss Microscopy GmbH’s hardware autofocus and cleanroom kit was designed for its Axio Imager Vario microscope system to enable faster, more precise in-process inspection.

An integratable autofocus system ensures fast and precise focusing for surface inspections on reflective, low-contrast samples. In transmitted and reflected light (bright field, dark field, polarization contrast and oblique illumination), it ensures high precision down to 0.3 of the depth of field of the objective lens. The sensor registers changes to the focus position and automatically compensates any deviations via direct access to the microscope’s Z-drive. This enables even large samples such as monitors and solar panels to remain constantly in the user’s focus in the X-Y direction.

The hardware autofocus is fully integrated in modules such as MosaiX for automated overview image capture. Axio is certified for cleanroom use in accordance with DIN EN ISO 14644-1 and, with the cleanroom kit, fulfills the requirements of ISO 5, the most commonly used cleanroom class. Accessories such as the 7x turret with particle protection and sneeze guard ensure that samples such as wafers and photomasks are clean at all times.


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An instrument consisting essentially of a tube 160 mm long, with an objective lens at the distant end and an eyepiece at the near end. The objective forms a real aerial image of the object in the focal plane of the eyepiece where it is observed by the eye. The overall magnifying power is equal to the linear magnification of the objective multiplied by the magnifying power of the eyepiece. The eyepiece can be replaced by a film to photograph the primary image, or a positive or negative relay...
oblique illumination
A common technique in microscopy, oblique illumination is one in which the object is illuminated by a light source that is at an oblique angle (on the side) to the optical axis. This technique is often used to highlight otherwise visible structures as well as giving the image a three dimensional appearance.
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