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Trioptics GmbH - Worldwide Benchmark 4-24 LB

IPUP2 Vacuum Pump

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Edwards Vacuum
Edwards Group Ltd. has introduced the IPUP2, an integrated point-of-use pump for load-lock and transfer chamber applications on Applied Materials’ manufacturing platforms and for use by semiconductor manufacturers. The second-generation device reduces pump down times by ~50%, uses 70% less energy and requires no maintenance between overhauls. Its power curve and pumping speed (180 m3/h) have been optimized to increase tool throughput. Peak pumping speed is 89% faster than first-generation pumps and down times are up to 54% faster. The pump includes horizontal and vertical...See full product

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