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Nexview 3-D Imaging and Surface Metrology System

Photonics Spectra
Nov 2013
Zygo Corporation, Ultra Precision TechnologiesRequest Info
 
MIDDLEFIELD, Conn., Aug. 23, 2013 — Zygo Corp.’s Nexview 3-D imaging and surface metrology system offers subnanometer vertical resolution independent of magnification for the production and scientific research markets.

Able to operate on slopes up to 85° and in high-vibration environments, the profiler conducts noncontact surface metrology on a variety of surfaces, from very smooth to very rough, and safely measures fragile and transparent materials without altering the test surface. Proprietary Mx software produces high-fidelity surface topography maps for measuring roughness, flatness, angles, films, steps and more.

Other features include scanner-based crash protection; automated X-Y-Z and tilt staging; a 200-mm X-Y travel stage capable of 20-lb parts; a vertical travel of 100 mm; and an integrated head riser that can accommodate samples up to 160 mm tall.


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GLOSSARY
metrology
The science of measurement, particularly of lengths and angles.
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