Feb 2000Meller Optics Inc.Request Info
Meller Optics Inc. produces ultraflat sapphire wafers for use as base plates for mounting substrates in semiconductor device manufacturing. The wafers have flatness to 0.5 fringes of HeNe and parallelism from 20 to 1 s, with ±1.2-µm piece-to-piece uniformity. The discs permit thin-film processing, can be polished on one or both sides, and are impervious to caustic etching agents. Transparent in the IR, the wafers are available with 50- to 82-mm diameters, tolerances to ±0.5 mm and thicknesses from 0.5 to 3 mm.