XMS100V Vertical Linear Stage
Jul 2014Newport CorporationRequest Info
The XMS100V is an ultrahigh-precision stage with 50-nm MIM and repeatability. Based on linear motor technology and a direct read analog glass encoder, the XMS100V has better than 1.5-µm accuracy and gets up to 300-mm/s speeds. The air counterbalance can be easily adjusted to different loads and tuned effortlessly through the XPS controller.