Nov 2014SCANLAB GmbHRequest Info
PUCHEIM, Germany, Sept. 15, 2014 — New galvanometer drivers from Scanlab AG have lower inertia for precision laser positioning.
The drives are equipped with lightweight beryllium mirrors and a 14-mm aperture. The positioning encoder uses a zero-mass laser beam to sense a stationary scale, eliminating inertia-increasing components.
The new technology is featured in Scanlab’s dynAXISse galvanometer scanner and intelliSCANse 2-D scan system. Applications include semiconductor lithography, microstructuring, and processing of electronics and displays.