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ALD System

Industrial Photonics
Jul 2015
Ultratech/CNTRequest Info
 
SAN JOSE, Calif. — Ultratech Cambridge NanoTech has announced a new atomic layer deposition (ALD) system for creating and characterizing thin films.

The Savannah G2 features a low-vapor precursory delivery system for growth of novel materials including single- and multicomponent perovskite, yttrium, lithium and rare-earth films.


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