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Piezo Stage Scanners

Photonics Spectra
Jun 2015
PI (Physik Instrumente) LP, Air Bearings and Piezo Precision MotionRequest Info
AUBURN, Mass. — PIHeraThe PIHera family of piezo stage scanners by PI (Physik Instrumente) LP are suitable for nanopositioning applications such as micromanufacturing, photonics and test alignment, superresolution microscopy and scanning probe microscopy.

The compact single- and two-axis X, X-Y and Z flexure-guided piezo nanopositioning stages offer travel ranges from 50 μm to 1.8 mm. They come in 60 standard variations, including closed loop with digital and analog control, and they provide subnanometer resolution. Ultrahigh-vacuum-compatible models also are available.


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