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Bristol Instruments, Inc. - 872 Series High-Res 4/24 LB

Wear-Resistant Films

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Morgan Advanced Materials plc
Sacrificial wear layers to extend the life of alumina or beryllia electrostatic chucks (ESCs) for semiconductor, solar and LED applications are offered by Morgan Technical Ceramics, a division of Morgan Advanced Materials PLC. Diamonex technical hard coats are made of diamond-like-carbon (DLC) and other nanocomposite materials. They are adjusted to meet specific resistivity requirements of the ESC while protecting electronic layers and extending the overall life of the part. They have a range of chemical resistance, meet chamber process compatibility requirements and can withstand...See full product

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