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Linear Motor Stage
Jun 2015
Aerotech Inc.Request Info
PITTSBURGH, June 17, 2015 — Aerotech PlanarDLAAerotech Inc. has introduced the PlanarDLA series of integrated, open-frame, low-profile linear motion stages.

Applications range from two-sided LED wafer processing, where high dynamics and micron-level straightness are required, to quasistatic optical metrology, where high-accuracy and precise geometric performance are necessary.

High-precision roller bearings, precision-machined surfaces and noncontact direct-drive linear motors driving through the axes' centers of stiffness result in a positioning stage with straightness to ±0.5 μm and flatness to ±1.25 μm. The stages enable high-throughput processing with 2-m/s velocities and 2-g accelerations.

Stages are available with one or two motors per axis, allowing optimization of each axis for the specific application and process. Three versions are available, including the Plus and Ultra options that enable accuracies and straightness values to ±500 nm and orthogonality to 5 μrad.


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