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Nanopositioning Stages

Photonics Spectra
Oct 2015
PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
 
AUBURN, Mass. — PIHeraSuitable for applications that require frictionless, vibration-free positioning with high linearity, new nanopositioning stages from PI (Physik Instrumente) LP offer travel ranges of 50 to 250 μm and positioning accuracy of 0.02 percent.

PIHera Z flexure-guided piezo nanopositioning stages provide vibration-free motion with virtually unlimited resolution and a fast response. A lack of rolling elements ensures no bearing rumble for uniformity and straightness of motion.

The closed-loop Z stages are equipped with absolute-measuring direct-metrology capacitance sensors, providing a resolution down to 0.1 nm in a compact, finite-element-analysis-optimized package for high stiffness and a long lifetime.


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GLOSSARY
metrology
The science of measurement, particularly of lengths and angles.
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