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Sapphire Wafer Carriers

Photonics Spectra
Dec 2015
Meller Optics Inc.Request Info
 
PROVIDENCE, R.I. — Sapphire Wafer CarriersCustom-fabricated sapphire wafer carriers from Meller Optics Inc. feature uniform thickness and parallelism, and are highly durable for thinning semiconductors.

The carriers feature Moh 9 hardness, allowing them to be produced as thin as 0.018-in. with 1.2-μm uniform thickness and 10-arcsec parallelism. Custom perforated with hole patterns to fit vacuum hold-down or delamination fixtures, they facilitate semiconductor thinning to assure consistent part-to-part uniformity.

Available in 2- to 6-in. diameters, the carriers can be supplied with reference flats and laser markings. Capable of withstanding repeated use, the carriers are hard, strong, chip- and scratch-resistant, and are impervious to solvents and etchants.


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