Aug 2016PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
AUBURN, Mass. — Physik Instrumente LP has announced the PIHera XY positioners with travel to 1800 μm and <1-nm resolution.
The flexure-guided piezo positioning stages have vibration-less motion, virtually unlimited resolution and fast response. With the exclusion of rolling elements, there is no bearing rumble to affect the uniformity or straightness of motion. PIHera precision closed-loop XY stages are equipped with absolute-measuring direct-metrology capacitance sensors and provide a positioning accuracy of 0.02 percent.
The P-620.2 to P-629.2 piezo motor positioners are designed for nm-adjustment precision in applications such as microassembly, beam guidance, photonics and optical metrology.