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Nanopositioning Stages
Aug 2016
PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
Auburn, Mass., Aug. 10, 2016 — Physik Instrumente GmbH & Co. KG has announced the P-630 nanopositioning stages for very small position changes.

The P-630 X-axis nanopositioning stage, with a large, clear 30-mm diameter aperture, 0.1-nm resolution, a small footprint and low-profile, will ensure high accuracy and long life with travel ranges to 80 µm. Equipped with an internal capacitive sensor that allows for precise, extremely stable motion, the stiff flexure design, with a natural frequency of >3 kHz, enables exceptional responsiveness and accuracy. A vacuum version is also available.

With design flexibility to meet custom assembly requirements and proven demonstrated reliability of many billions of cycles, piezo actuators are being utilized in research and industry microstructuring and scanning applications, precision positioning of optical elements and micromachining.


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