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Piezo Scanner

Photonics Spectra
Dec 2016
PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
 
AUBURN, Mass. — Piezo ScannerBased on a parallel-kinematic design, the P-616 NanoCube XYZ piezo scanner from Physik Instrumente LP is a redesign of the P-611 3D positioning stage.

The device features one lightweight moving platform for all three axes, high precision and dynamics in a compact package. It is the company’s smallest and lightest system with capacitive feedback delivering 100-µm travel range. The XYZ stage is driven by ceramic-encapsulated, preloaded PICMA piezo actuators that provide better performance and reliability than conventionally insulated piezo actuators.

Applications include photonics alignment, microscopy, 3D imaging, screening, surface analysis and wafer inspection.


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ProductsP-616NanoCubeXYZpiezo scannerAmericas

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