Dec 2016PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
AUBURN, Mass. — Based on a parallel-kinematic design, the P-616 NanoCube XYZ piezo scanner from Physik Instrumente LP is a redesign of the P-611 3D positioning stage.
The device features one lightweight moving platform for all three axes, high precision and dynamics in a compact package. It is the company’s smallest and lightest system with capacitive feedback delivering 100-µm travel range. The XYZ stage is driven by ceramic-encapsulated, preloaded PICMA piezo actuators that provide better performance and reliability than conventionally insulated piezo actuators.
Applications include photonics alignment, microscopy, 3D imaging, screening, surface analysis and wafer inspection.