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EUVL Optical Coatings

Photonics Spectra
May 2017
Rigaku Innovative Technologies Inc.Request Info
 
AUBURN HILLS, Mich. — EUVL Optical CoatingsPrecision extreme UV lithography (EUVL) optical coatings from Rigaku Innovative Technologies Inc. are designed for manufacturing reflective mirrors in semiconductor industry wafer pattern printing.

The coatings are used in next-generation lithography techniques that will enable the semiconductor industry to continue to reduce printed transistor size. This increases device functionality by greatly increasing the number of transistors that can be printed on a chip. In addition, the chips consume less power, a critical factor in extending device battery life.

The new chips will be used to continue the evolution of smartphone technology, GPS devices, home entertainment and numerous other wireless applications.


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