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Modular Ellipsometer

Photonics Spectra
Oct 2017
HORIBA ScientificRequest Info
 
EDISON, N.J. — Modular EllipsometerThe UVISEL Plus modular ellipsometer from Horiba Scientific includes acquisition technology designed to quickly and accurately measure thin-film samples.

FastAcq acquisition technology is based on double modulation, designed for real-world thin-film characterization. Based on a new electronic data processing and high speed monochromator, FastAcq technology enables a sample measurement from 190 to 2100 nm to be completed within three minutes at high resolution. The UVISEL Plus also introduces a new calibration procedure, delivering faster performance and accuracy. Without rotating elements or additional components in the optical path, UVISEL Series phase modulation technology delivers pure and efficient polarization modulation for accurate ellipsometric parameter measurements.

UVISEL Plus offers microspots for patterned samples down to 50 µm, variable angles from 40 to 90°, an automatic horizontal mapping stage and a variety of accessories. The spectral range from 190 to 2100 nm is covered by two UVISEL Plus configurations: 190 to 920 nm and an NIR extension up to 2100 nm. Applications include materials research and processing, flat panel displays, microelectronics and photovoltaics.


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