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Large Sample Microscopes

EuroPhotonics
Dec 2017
Olympus Europa SE & Co. KG, Medical Systems & Micro-Imaging Solutions GroupRequest Info
 
HAMBURG, Germany — Large Sample MicroscopesThe MX63 and MX63L microscopes from Olympus Europa SE & Co. KG can inspect large industrial samples with flexibility and ease.

Designed for precision inspections on electronic equipment, users can choose either the MX63 microscope for wafers up to 200 mm or the MX63L for wafers up to 300 mm. The microscopes’ modular design enables inspectors to choose the components that they need for their application. Both microscopes are designed for cleanrooms and comply with SEMI S2/S8, CE and UL. All motorized components are housed in a shielded structure, and the frame, tubes, breath shield and other parts are subjected to antistatic processing.

A long-life white LED illuminator provides consistent color temperature for reliable image quality and accurate color reproduction. Further enhancing the microscopes’ observation capabilities, the MX63 and MX63L microscopes are the first in the series to support Olympus’ MIX illumination.


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