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Mini XY Stage

Dec 2017
PI (Physik Instrumente) LP, Air Bearings and Piezo Precision MotionRequest Info
AUBURN, Mass. — Mini XY StageThe U-723 mini XY stage from Physik Instrumente LP is an ultra-compact XY scanner and positioner powered by small integrated direct-drive ultrasonic piezoceramic motors.

The patented drives provide smooth motion with high resolution, and the self-locking motor principle is a significant advantage over magnetic drive technologies. Once the motor reaches a target position, it acts like a ceramic brake and locks the platform into place, providing extreme long-term stability at zero driving current and heat generation. The device provides >0.8-in. travel per axis with a footprint of 42 × 42 mm. A low profile of 21 mm and miniaturized design allows for easy integration into existing systems, especially when space is limited.

In addition to high-speed motion up to 200 mm/s, low inertia allows for a dynamic start-stop behavior with settling times in the ms range. Based on the ultrasonic principle with drive frequencies >100 kHz, the motors are very quiet. Displacement is generated in continuous subnanometric increments, leading to extremely smooth motion with a wide dynamic range from 1 µm/s to 200 mm/s. Incorporated optical linear encoders provide position feedback with 10-nm resolution. The U-723 can be integrated into mobile measuring and medical devices.


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