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PlanarDL XY, Linear-Motor Stage

Photonics Showcase
Nov 2017
Aerotech Inc.Request Info
 
PlanarDL XY, Linear-Motor StageAerotech’s PlanarDL-series integrated, low-profile, XY, linear-motor stages offer excellent geometric and dynamic performance in a compact and cost-effective package. Available in nine different travel and performance configurations, this stage is the ideal solution for applications ranging from high-accuracy surface profilometry to high-speed semiconductor and LED wafer scribing.


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