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INDUSTRIAL WORKSTATION

Photonics Spectra
May 1997
IPG Photonics, Microsystems Div.Request Info
 
JPSA Inc. introduces its Series IX-1000 industrial excimer workstation, a compact integrated UV microprocessing system with a built-in high- power excimer laser. It features coordinated opposing motion control, step and scan, dual-sided exposure and high-resolution imaging and workpiece viewing using the JPSA Chromacel line of advanced beam delivery equipment. Optional modules include beam attenuators and homogenizers and dielectric laser masks.


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