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CLOSED-LOOP AIR CHILLERS

Photonics Spectra
May 1997
FTS Systems, Thermal ProductsRequest Info
 
FTS Systems Inc.'s recirculating air chillers were designed to replace costly open-loop liquid nitrogen systems used to cool handlers and semiconductor test chambers, and to reduce setup times of materials. The self-contained, closed-loop systems cool air to ­75 °C at 40 SCFM, utilizing mechanical refrigeration technology. They were designed for continuous duty with dual air channels. Air movement is provided by a quiet, self-contained blower, and a digital PID temperature controller handles all on-board functions and diagnostic operations.


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