LINEAR MOTOR STAGE
Feb 2001Aerotech Inc.Request Info
Aerotech Inc. has released the ALS130 linear motor stage for high-accuracy alignment and inspection stations. It employs a center-driven, noncogging linear motor as its driving element, eliminating backlash and windup. The stage has a resolution of 20 nm when it is coupled with the MXH series multiplier box. Its construction and compact design provide a straight and flat standard stage <±2 µm over the entire travel. The stages are available with precision cross-roller or linear motion guide bearing systems for smooth motion and a linear motor drive for high speeds and accelerations.