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DRYING/CURING

Photonics Spectra
Apr 2001
Specialty Coating Systems Inc.Request Info
 
A hot-plate accessory from Specialty Coating Systems dries and cures photoresists, epoxies and other thermally cured or solvent-based materials applied to flat substrates, such as spin-coated wafers. Designed for use with the company's line of portable precision spin coaters, which include several bowl sizes with chucks for various substrate sizes and shapes. The hot plate is operated with a single control and can be set to any temperature between 50 and 150 °C, maintaining the selected level with an accuracy of ±1% across the working surface.


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