MULTIAXIS STAGES WITH SUBNANOMETER RESOLUTION
Aug 1997PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
Physik Instrumente GmbH & Co. has developed the P-517.2C and P-527.2C X-Y piezoelectrically driven flexure stages. They feature 100 3 100- and 200 3 200-µm X-Y travel ranges, integrated capacitive displacement sensors, subnanometer resolution and a 66 3 66-mm clear aperture. The positioners are equipped with low-voltage piezoelectric drives integrated into a flexure guiding system, which eliminates friction and improves guiding precision. With a 10- to 20-ms settling time, they are suited for fast scanning operations including semiconductor inspection systems, CD measurement and microlithography.