Request InfoPI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsPhysik Instrumente GmbH & Co. has developed the P-517.2C and P-527.2C X-Y piezoelectrically driven flexure stages. They feature 100 3 100- and 200 3 200-µm X-Y travel ranges, integrated capacitive displacement sensors, subnanometer resolution and a 66 3 66-mm clear aperture. The positioners are equipped with low-voltage piezoelectric drives integrated into a flexure guiding system, which eliminates friction and improves guiding precision. With a 10- to 20-ms settling time, they are suited for fast scanning operations including semiconductor inspection systems, CD measurement and...See full productRelated content from Photonics MediaPRODUCTSPhotonics.com 4/26/2022Automated System SensorsThe 36 sensor series from Leuze electronic Inc. detects objects at high operating ranges. 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