Aug 1997Rudolph Technologies Inc.Request Info
Rudolph Technologies Inc.'s Vanguard SpectraLASER 200XL is a transparent film metrology tool with the power of spectroscopic ellipsometry. The system uses lasers at 458, 633, 780 and 905 nm, plus a deep-UV reflectometer for accurate, repeatable results on thick and thin transparent films in CMP, CVD and lithographic applications. The multiangle, multiwavelength system provides thickness, refraction index and absorption measurement. Adding a deep-UV reflectometer allows characterization of AR coatings and back AR coatings.