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THICKNESS MEASUREMENT

Photonics Spectra
Aug 1997
Rudolph Technologies Inc.Request Info
 
Rudolph Technologies Inc.'s Vanguard SpectraLASER 200XL is a transparent film metrology tool with the power of spectroscopic ellipsometry. The system uses lasers at 458, 633, 780 and 905 nm, plus a deep-UV reflectometer for accurate, repeatable results on thick and thin transparent films in CMP, CVD and lithographic applications. The multiangle, multiwavelength system provides thickness, refraction index and absorption measurement. Adding a deep-UV reflectometer allows characterization of AR coatings and back AR coatings.


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GLOSSARY
metrology
The science of measurement, particularly of lengths and angles.
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