Request InfoRudolph Technologies Inc.Rudolph Technologies Inc.'s Vanguard SpectraLASER 200XL is a transparent film metrology tool with the power of spectroscopic ellipsometry. The system uses lasers at 458, 633, 780 and 905 nm, plus a deep-UV reflectometer for accurate, repeatable results on thick and thin transparent films in CMP, CVD and lithographic applications. The multiangle, multiwavelength system provides thickness, refraction index and absorption measurement. 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