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Micro Photonics Inc. has announced the SPM ProberStation 150, a vision inspection system that combines 3-D inspection and optical microscopy to perform fast and repeatable atomic force and scanning probe microscopy studies. Built on a stable granite stage, it eliminates undesired movement in the vertical (Z) direction during movement in the lateral (X-Y) plane and maintains maximum stability during nanometer movement in lateral and vertical directions. The motorized stage’s large travel area accommodates samples up to 150 × 250 mm. Functions include mapping of the lateral plane and automatic shifting between inspection operations via a joystick controller. The integrated optical microscope offers manual zoom and adjustment of the focal plane.

Photonics Spectra
Aug 2007

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3-D inspectionBasic ScienceMicro Photonics Inc.MicroscopyNew Productsvision inspection system

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