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3D Optical Profilers

Photonics.com
Dec 2018
Zygo CorporationRequest Info
 
MIDDLEFIELD, Conn., Dec. 15, 2018 — 3D Optical ProfilersThe ZeGage Pro and ZeGage Pro HR from Zygo Corp. are 3D optical profiling instruments that provide precise, rapid, noncontact measurement of surface tomography for enhanced quality and process control.

The two models offer up to 2× improvement in data points, a 50 percent larger maximum field of view, and increased measurement speed with simplified setup. The ZeGage Pro systems maintain a small footprint with versatile performance and ease of use. The time-saving large field-of-view, combined with optional automated part staging, allows larger components to be measured quickly and easily in most environments.

At the core of the ZeGage Pro 3D optical profiler is ZYGO’s MxTM software platform. This comprehensive user-friendly control and analysis platform supports a broad range of surface metrology applications and data analyses. The rich suite of features includes results compliant with ISO 25178 and 4287, image stitching, and automated measurement patterns.


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