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3D Optical Profiling Instruments

Zygo CorporationRequest Info
 
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MIDDLEFIELD, Conn., Nov. 20, 2018 — 3D Optical Profiling InstrumentsZeGage 3D optical profiling instruments from Zygo Corp. provide precise and rapid noncontact measurement of surface topography for enhanced quality and process control.

The ZeGage Pro and ZeGage Pro HR offer up to 2× improvement in data points, a 50 percent larger maximum field of view, and increased measurement speed with simplified setup. The ZeGage Pro systems maintain a small footprint with versatile performance and ease of use. The system’s time-saving large field-of-view, combined with optional automated part staging, allows larger components to be measured quickly and easily in most environments.

At the core of the ZeGage Pro 3D optical profiler is ZYGO’s MxTM software platform. This user-friendly control and analysis platform supports a broad range of surface metrology applications and data analyses. The rich suite of features includes results compliant with ISO 25178 and 4287, image stitching, and automated measurement patterns. The ZeGage Pro profilers now expand this offering with unique features that simplify operation and minimize operator variability.



Published: November 2018
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