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Greenlight Optics LLC - Photonics West Booth 1-26 LB

6-Axis Motorized Automation Platform

PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsRequest Info
 
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6-Axis Motorized Automation Platform. Courtesy of PI.The F-690.S1 SpaceFAB from PI (Physik Instrumente) is a 6-axis motorized positioning stage platform for automation tasks in PICs, photonics, metrology, semiconductor test, micro-assembly, and optics. The F-690.S1 is designed with three symmetrically arranged XY nanopositioning stages with direct-drive linear motors and cross-roller bearings. Each stage supports a linear bearing mounted on a wedge with ball-joint connections, enabling full 6-degree-of-freedom motion with smooth coordination and minimal mechanical crosstalk. The platform has a resolution of 1 nm and supports payloads up to 2 kg. The travel range is XY: 50 mm, Z: 25 mm, Rotational: Theta X / Y: 15°; Theta Z: 30°. It has a max speed of 500 mm/s (linear), 100°/s (rotational), and a minimum incremental motion of 10 nm / 2 µrad. It has a repeatability of ±50 nm (XY), ±75 nm (Z), and ±2 µrad (rotational).


Published: August 2025




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