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642-1 Calibration Light Source

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CHELMSFORD, Mass., May 12, 2010 — McPherson Inc.’s Model 642-1 wavelength calibration source for extreme ultraviolet and soft x-ray applications features a six-position anode carousel to exchange target materials. It permits selection of various emission wavelengths without breaking vacuum. Dual symmetrical output beams provide sample/reference comparison and device calibration in various test setups.

The Manson-type electron impact light source uses a hot filament to produce electrons subsequently accelerated toward a solid anode target by high voltage. The extreme-ultraviolet output emission spectrum follows the target anode material valence band structure. Users can readily exchange anodes in the carousel to produce desired wavelengths, for example Ti (0.27 nm), Si (0.71 nm) and Mg (0.98 nm). Many different anodes are characterized and available as accessories. This source is principally different from the company’s exchangeable single-anode Model 642 and other sealed single-wavelength x-ray tubes because a selection of materials is installed in the evacuated housing at one time.

The vacuum housing of the source features standard ConFlat flanges. Options include calibration branches to mount pinholes, collimators, filters and proportional counters or other standard detectors. The light source is compact and controllable, and output is debris-free. It is easy to set up and enables laboratories to reliably perform at-wavelength calibration and metrology of extreme-UV lithography materials, as well as multilayer or grazing incidence optical systems for astrophysics and other fundamental research.
May 2010

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Americascalibration branchesConFlat flangesdebris-freedual output beamselectron impactextreme ultraviolethot filamentindustriallight sourcesManson-typeMcPhersonmetrologyModel 642-1ProductsSensors & Detectorssix-position anode carouselsoft x-raywavelength calibration source

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