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ABRS Rotary Air-Bearing Stages

Aerotech Inc.Request Info
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PITTSBURGH, May 25, 2011 — The ABRS high-precision rotary air-bearing stages manufactured by Aerotech Inc. have a slotless zero-cogging motor and a low-profile design to reduce effective working height and minimize stack-up errors. They deliver maximum positioning accuracy for precision applications.

Designed for high-precision angular positioning and velocity stability, the stages’ high stiffness and load capacity minimize axial, radial and tilt error motion to satisfy applications requiring good planar performance.

The brushless motor is inherently torque-ripple-free to maximize positioning accuracy. The stages meet the motion control requirements of semiconductor wafer inspection, high-precision metrology, x-ray diffraction, optical inspection and fabrication, and microelectromechanical systems/nanotechnology device fabrication.

Large air-bearing surfaces provide the high stiffness and load capacity for reduced face error motion. A direct-coupled rotary encoder achieves resolution of <0.03 arcsec and accuracy of ±1 arcsec or less when used with the unit’s feedback multipliers and controls. A clear aperture facilitates product feed-through, laser beam delivery and cable clearance.

Custom versions of the ABRS are available for rate table and inertial guidance test-stand applications.
May 2011

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ABRS seriesAerotechair-bearingAmericasangular positioningbrushless motorclear apertureMEMSmetrologymicroelectromechanical systems fabricationnanotechnology device fabricationoptical fabricationoptical inspectionPennsylvaniaProductsrotaryrotary encodersemiconductor wafer inspectionslotless motorstagesTest & Measurementtorque-ripple-freevelocity stabilityx-ray diffractionzero cogging

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