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ATL Lasertechnik GmbHRequest Info
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ATL Lasertechnik GmbH announced its new compact air-cooled excimer laser systems, which operate at 193, 248 and 308 nm and utilize total-metal-ceramic technology. The ATLEX SPi lasers have a pulse energy of about 10 mJ at 248 nm and repetition rates of 200 Hz. The raw laser beam produces energy density of 100 mJ/cm2, comparable to that of standard excimer lasers. With pulse lengths of only 3 ns, the lasers permit extremely high peak power density at 30 mW/cm2.

Photonics Spectra
Apr 1997
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