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ANT130-XY Nanopositioners

Aerotech Inc.Request Info
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PITTSBURGH, Sept. 21, 2011 — A series of two-axis linear motor nanopositioner stages from Aerotech provide 1-nm resolution with up to 160 × 160-mm travel.

The ANT130-XY stages allow travel in two dimensions with a low profile of 85 mm. With repeatability of 75 nm and accuracy of 250 nm per axis, the stages support all applications that require nanopositioning performance with extreme in-position stability and smooth motion.

They are designed for use in a wide range of research and development and manufacturing fields, including data storage, semiconductors, laser micromachining, medical, sensor testing, inspection, materials deposition and microelectromechanical systems/nanotechnology device fabrication.

The stages use proprietary advanced direct-drive technology as well as crossed-roller bearings to achieve high positioning performance. The direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable motion in both the X- and Y-dimensions. All travel options (60 × 60 mm, 110 × 110 mm, 160 × 160 mm) are supplied at the 85-mm profile height.

The ANT130-XY design optimizes critical elements such as orthogonality, straightness and flatness, resulting in a stage with high geometrical tolerances. The integrated cable management system is designed to minimize drag forces.

The stages can be combined with the company’s other ANT series products — such as vertical lift stages, direct-drive rotaries and goniometers — to create multiaxis nanopositioning systems.
Sep 2011

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