AUTOMATED DEEP-UV INSPECTION SYSTEM
Carl Zeiss Microscopy LLCRequest Info
The 300-mm Axiospect 300 from Carl Zeiss Inc. is designed for the inspection and defect analysis of 0.13-µm and higher geometries. Its new optical system offers deep-UV imaging as a basic capability. The Axiospect has a 20-in., high-resolution flat screen for image viewing. Advanced software based on Windows NT provides digital image processing and management with GEM/SECS-II compliance, and defect review file support of KLA, Tencor, Inspex and Orbot formats. Imaging in UV can be done in standard bright field at 365 and 248 nm, and in laser confocal scanning at 365 nm.
http://www.zeiss.com/microscopy
/Buyers_Guide/Carl_Zeiss_Microscopy_LLC/c16324
Published: October 1998
REQUEST INFO ABOUT THIS PRODUCT
* First Name:
* Last Name:
* Email Address:
* Company:
* Country:
Message:
When you click "Send Request", we will record and send your personal contact information to Carl Zeiss Microscopy LLC by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our
Privacy Policy and
Terms and Conditions of Use.
Register or login to auto-populate this form:
Login
Register
* Required