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AVS 2.0 Monitoring Software

CyberOptics Corp.
 
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BEAVERTON, Ore., Dec. 30, 2010 — CyberOptics Semiconductor Inc. has demonstrated the newest application of its wafer vibration monitoring software as well as a new airborne particle sensor for wafer processing equipment.

With vibration tied to semiconductor process equipment failure, and low yields and cycle times, the AVS 2.0 vibration monitoring software provides engineers the data they need to improve processes.

Working in unison with the company’s auto vibration system, the AVS 2.0 enables fab engineers to identify vibration anomalies during wafer processing by filtering out acceptable vibration frequencies produced by regular slow-moving equipment or high-frequency noises between 1 to 200 Hz. New upgrades include enhanced trace plotting (actual graphical data representation) that improves the visual analysis of data, and data exportation capabilities that support third-party applications.

The airborne particle sensor is based on patented particle-sensing technology that monitors airborne particles in process equipment, reporting information in real time to allow engineers to efficiently validate and analyze wafer contamination. By reducing the time and expense associated with process equipment particle qualification, the sensor helps improve die yield and compresses final wafer inspection.


Photonics.com
Dec 2010
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