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Abatement System

EuroPhotonics
Dec 2009
Edwards VacuumRequest Info
 
Edwards.jpgEdwards Ltd. has unveiled the Spectra ZW abatement system for solar cell and flat panel manufacturing. The compact instrument, which includes an integrated wet scrubbing system, provides particulate and acid gas capture in a high-flow chemical vapor deposition process. It can function as a stand-alone unit, or it can be integrated into the proprietary Zenith for a custom-built vacuum pump/abatement solution, or combined with the optional wet electrostatic precipitation unit. It features standard process flows of greater than 16 standard l/min of silane, 200 standard l/min of hydrogen and 40 standard l/min of nitrogen trifluoride.


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