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Actuators, Rotation Stage

MKS/NewportRequest Info
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Newport Corp.’s vacuum-compatible LTA series actuators and URS50B rotation stage are for research and industrial applications. Compatible with 10 x e—6 hPa (7 x 10 e—6 torr) vacuum, they are designed for integration into critical sample positioning or beam management processes in vacuum environments. The vacuum stage features a motor-mounted encoder that is useful in detecting the stall of a stepper motor because the stage is not accessible when installed inside a vacuum chamber. The encoder offers good position repeatability, a critical factor in many research and commercial applications in vacuum environments. With nonrotating tips, the LTAHSPPV6 and LTAHLPPV6 actuators are extensions of the LTA actuators and are rated at 10,000 h mean time between failures.

Photonics Spectra
Dec 2011

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actuators nonrotating tipsactuators submicron minimum incremental motionactuators unidirectional repeatabilityAmericasbeam managementCaliforniaindustrialLTA actuatorsLTAHLPPV6 actuatorsLTAHSPPV6 actuatorsNew ProductsNewportrotation stage motor-mounted encoderrotation stage top mountingsample positioningTest & MeasurementURS50B rotation stageURS50BPPV6 rotation stagevacuum-compatible actuatorsvacuum-compatible rotation stage

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