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Aerosol Particle Counter

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Particle Measuring Systems Aerosol Particle CounterThe NanoAir 10 from Particle Measuring Systems is a 10-nm condensation, laser system-based particle counter that can be used in traditional cleanrooms. It enables detection of yield impacting particle excursions at their source for 24/7/365 monitoring inside process tools, in pressurized high-purity gas delivery, and in ultra-cleanroom areas. The counter features an 83% smaller build compared to others, coverage of 120 m2, and the ability to measure high-pressure gas lines in order to continuously monitor inert gases. An LED indicator function gauges laser and flow error, as well as activity and working fluid level.


Published: October 2023
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