Air Bearing Stage

PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsRequest Info
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AUBURN, Mass., June 19, 2015 — PIglide HSPI (Physik Instrumente) LP has announced the PIglide HS planar X-Y air bearing stage, designed to maximize throughput while providing precision.

The device uses magnetically preloaded air bearings on the Y axis and a vacuum preloaded X-Y puck that floats on the reference surface. The crossbeam mounts to the Y axis via a flexural coupling that provides yaw compliance without sacrificing system stiffness.

Suitable for wafer inspection and scribing applications, the PIglide is also suited for other ultraprecision motion applications such as flat panel inspection.

Published: June 2015
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