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Alignment Stage

Optimal Engineering Systems Inc.Request Info
 
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Alignment StageThe XYR-03-01 alignment stage from Optimal Engineering Systems Inc. is a high-resolution, high-repeatability XY-theta stage.

The linear resolution of the X and Y axis is 5 μ (non-micro-step) or 0.125 μ (20 micro-steps per step motor driver in use), repeatability is 1.5 μ, and positional accuracy is 5 μ. The 1-mm/turn lead screws, preloaded V-groove, and crossed roller bearings add to the high precision and stiffness of the XYR-03-01 alignment stage. The linear travel of the X and Y axes is 50 × 50 mm.

Applications include angular glass cutting and grinding, wafer alignment, semiconductor handling, laser cutting, and drilling.


Published: April 2018
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