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Alignment Stage

Optimal Engineering Systems Inc.Request Info
 
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VAN NUYS, Calif., Sept. 5, 2022 — Alignment StageThe XYR-300-400 Alignment Stage from Optimal Engineering Systems Inc. offers +/-3-μm accuracy for industrial, medical, semiconductor, production, research, and laboratory applications.

The stage features +/-15-mm of travel in the X and Y axes and +/-5° of rotation, moving in the XY-plane and rotating around the center of the XY-plane. It provides 1-μm linear resolutions of the X and Y axis with 10 micro-steps/step motor driver and static parallelism of <0.05 mm. Two-phase stepper motors are standard, but stepper motors with quadrature optical encoders are also available. The 8-mm diameter, 2-mm/turn precision ball screws, and preloaded V-groove and crossed roller bearings add to the high precision and stiffness of this compact device.


Published: September 2022
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