Annealing System

3D-Micromac AGRequest Info

The microVEGA^™ xMR from 3D-Micromac AG is an industrial selective laser annealing system for magnetic sensor formation.

Incorporating a highly flexible, high-throughput tool configuration with on-the-fly spot and variable laser energy, the microVEGA xMR accommodates both giant magnetoresistance and tunnel magnetoresistance sensors, and easily adjusts magnetic orientation, sensor position, and sensor dimension. Magnetic field strength and orientation is adjustable and high-temperature gradients ensure low thermal impact, allowing sensors to be processed directly next to read-out electronics while being closer together. It enables the production of smaller sensors, freeing up space for processing more devices per wafer.

The device provides a flexible, robust approach to integrated magnetic sensor formation that enables users to implement new sensor designs, lower production cost, and quickly scale up to production.

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Photonics Spectra
Apr 2021

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Annealing System