Search Menu
Photonics Media Photonics Marketplace Photonics Spectra BioPhotonics Vision Spectra Photonics Showcase Photonics ProdSpec Photonics Handbook

ArF Excimer Laser

Gigaphoton Inc.Request Info
Facebook Twitter LinkedIn Email
OYAMA, Japan, Feb. 14, 2012 — Gigaphoton Inc. is introducing the GT63A, a next-generation deep-UV ArF excimer laser for multipatterning immersion lithography scanners.

The laser incorporates sMPL (spectrum multipositioning LNM)*1, a spectrum control (“focus drilling”) technology that achieves a wide depth of focus; sGRYCOS (sixty gigaphoton recycled chamber operation system), a chamber technology that lowers operating costs; sTGM (supreme total gas manager), a gas management system that enables longer uptime with less process gas use; and sMONITORING (smart monitoring), real-time information management that tracks laser stability.

The sMPL technology for focus drilling increases the laser spectrum control width, creating a greater depth of focus. Focus drilling enables expansion of the lithography process window for contact holes, trenches and vias, while avoiding negative effects on critical dimension uniformity, overlay and productivity.

The sGRYCOS technology extends the effective life of a laser chamber, reducing factory operating costs. This durability results from increasing the strength of the pre-ionization electrode in a newly developed chamber and uses a robust pulse-power supply.

The sTGM technology implements a wavelength calibration method to eliminate the need to routinely replace the laser chamber’s gas. It eliminates wasted process gases due to calibration requirements, reducing facility costs.

The sMONITORING technology is an extension of existing real-time monitoring of laser performance and can be connected with the end user’s fault detection and classification system to monitor operation. It is a final check upon highly stable laser output to the scanner and on-wafer performance.
Feb 2012

* Message:
(requirements, questions for supplier)
Your contact information
* First Name:
* Last Name:
* Email Address:
* Company:
Address 2:
Postal Code:
* Country:
Phone #:
Fax #:

Register or login to auto-populate this form:
Login Register
* Required

When you click "Send Request", we will record and send your personal contact information to Gigaphoton Inc. by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our Privacy Policy and Terms and Conditions of Use.
ArF excimer laserAsia-Pacificdeep-UV ArF excimer laserGigaphotonGT63AindustrialJapanlaser focus drillinglaser multipatterning immersion lithography scannerslaser sGRYCOS technologylaser sixty gigaphoton recycled chamber operation systemlaser smart monitoringlaser sMONITORING technologylaser sMPL technologylaser spectrum multipositioning LNM*1laser sTGM technologylaser supreme total gas managerNew ProductsProductslasers

back to top
Facebook Twitter Instagram LinkedIn YouTube RSS
©2023 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA, [email protected]

Photonics Media, Laurin Publishing
x We deliver – right to your inbox. Subscribe FREE to our newsletters.
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.