Close

Search

Search Menu
Photonics Media Photonics Marketplace Photonics Spectra BioPhotonics EuroPhotonics Vision Spectra Photonics Showcase Photonics ProdSpec Photonics Handbook

Argon Fluoride Light Source

Cymer Inc.Request Info
 
Facebook Twitter LinkedIn Email Comments
SAN DIEGO, Aug. 10, 2020 — Argon Fluoride Light SourceThe XLR 960ix argon fluoride (ArF) light source from Cymer Inc. addresses chipmakers’ tight patterning requirements at advanced nodes.

An optical pulse stretcher reduces speckle to improve local critical dimension uniformity and decrease patterning defects, increasing the yield of immersion lithography systems. In order to increase wafer output, the light source also features a fifth-generation chamber module, allowing high-volume fabrications to run one year between scheduled maintenance.

The XLR 960ix includes technologies that increase availability via fewer automated calibration and gas refresh events, as well as sustainability improvements via lower power and gas consumption.


Photonics.com
Aug 2020
REQUEST INFO ABOUT THIS PRODUCT

* Message:
(requirements, questions for supplier)
Your contact information
* First Name:
* Last Name:
* Email Address:
* Company:
Address:
Address 2:
City:
State/Province:
Postal Code:
* Country:
Phone #:
Fax #:

Register or login to auto-populate this form:
Login Register
* Required

When you click "Send Request", we will record and send your personal contact information to Cymer Inc. by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our Privacy Policy and Terms and Conditions of Use.
ProductsXLR 960ixargon fluorideArFlight sourcesCymerwaferindustriallithographyAmericas

back to top
Facebook Twitter Instagram LinkedIn YouTube RSS
©2020 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA, [email protected]

Photonics Media, Laurin Publishing
x We deliver – right to your inbox. Subscribe FREE to our newsletters.
X
Are you interested in this product?
When you click "Send Request", we will send the contact details you supply to Cymer Inc. so they may respond to your inquiry directly.

Email Address:
Name:
Company:
Stop showing me this for the remainder of my visit
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.