Search
Menu
Lumibird - You Have a Project 1-26 LB

Atomic Layer Deposition Platform

Beneq Oy
 
Facebook X LinkedIn Email
Atomic Layer Deposition Platform. Courtesy of Beneq.The Beneq Transform XP from Beneq is an atomic layer deposition (ALD) platform. Its 25-wafer mini-batch reactor delivers single-digit-second cycle times for oxide and nitride films with improved uniformity and conformality. Enhanced plasma-enhanced ALD control enables low-energy ion tuning for cleaner interfaces and optimized passivation. An in-cycle annealing step densifies films to achieve low-impurity, stoichiometric materials with controlled crystalline orientation. It is suitable for the production/development of high-aspect-ratio structures and high-throughput production in wide bandgap and radio frequency applications.


Published: December 2025




From the Photonics Marketplace
Productsthin-film deposition equipmentEuropeBeneqmanufacturingRFWideband GapAtomic Layer Deposition PlatformsALD Platforms

We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.