Search Menu
Photonics Media Photonics Marketplace Photonics Spectra BioPhotonics Vision Spectra Photonics Showcase Photonics ProdSpec Photonics Handbook

Auto Resistance Sensor

CyberOptics Corp.Request Info
Facebook Twitter LinkedIn Email
Auto Resistance SensorThe WaferSense® Auto Resistance Sensor® from CyberOptics Corp. features CyberSpectrum software for semiconductor tool setup and diagnostics.

The 300-mm sensor enables real-time resistance measurements of plating cell contacts in semiconductor electrochemical deposition applications. It quickly identifies and monitors resistance measurements with 50 separate pads around the perimeter utilizing a Kelvin sensing, four-wire resistance method to detect residue affecting plating pins.

Process and equipment engineers in semiconductor fabricators can predict when a tool needs maintenance with quantitative analysis of measured mean resistance over time, shorten equipment maintenance cycles, and improve cell-to-cell uniformity.

Photonics Spectra
May 2020
* First Name:
* Last Name:
* Email Address:
* Company:
* Country:

When you click "Send Request", we will record and send your personal contact information to CyberOptics Corp. by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our Privacy Policy and Terms and Conditions of Use.

Register or login to auto-populate this form:
Login Register
* Required

ProductsAuto Resistance SensorCyberOpticssemiconductorsSensors & DetectorsTest & MeasurementAmericas

back to top
Facebook Twitter Instagram LinkedIn YouTube RSS
©2023 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA, [email protected]

Photonics Media, Laurin Publishing
x Subscribe to Photonics Spectra magazine - FREE!
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.