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Auto Resistance Sensor

CyberOptics Corp.Request Info
 
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Auto Resistance SensorThe WaferSense® Auto Resistance Sensor®™ from CyberOptics Corp. features CyberSpectrum software for semiconductor tool setup and diagnostics.

The 300-mm sensor enables real-time resistance measurements of plating cell contacts in semiconductor electrochemical deposition applications. It quickly identifies and monitors resistance measurements with 50 separate pads around the perimeter utilizing a Kelvin sensing, four-wire resistance method to detect residue affecting plating pins.

Process and equipment engineers in semiconductor fabricators can predict when a tool needs maintenance with quantitative analysis of measured mean resistance over time, shorten equipment maintenance cycles, and improve cell-to-cell uniformity.

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Photonics Spectra
May 2020
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